SEM5000Pro Field Emission Scanning Electron Microscope
Manufacturer: CIQTEK – China
Model: SEM5000Pro
Country of Origin: China

High-resolution, low-voltage imaging is enabled by CIQTEK’s “Super-Tunnel” electron optics, which eliminate beam crossover and utilize electrostatic-magnetic combined lens design. This minimizes charging effects, aberrations, and ensures 1.2 nm resolution at 1 kV for effective imaging of non-conductive and semiconductor samples with minimal beam damage.

Electron Optics
Electron Source: Schottky Field Emission Gun (FEG)
Resolution: 0.8 nm @ 15 kV; 1.2 nm @ 1 kV
Acceleration Voltage Range: 20 V – 30 kV
Beam Current Range: 1 pA – 20 nA
Magnification: 1× – 2,500,000× (optical magnification 1–16×)
Objective Lens: Water-cooled, constant-power, for thermal stability and image consistency
"Super-Tunnel" Optics: High-voltage tunnel for superior low-voltage resolution
Aperture System: 6-position electro-magnetic selectable, enabling quick switching between high-resolution imaging and high-current signals
Non-Crossover Beam Path: Reduces aberrations, enhancing image clarity

Vacuum System
Pumps: 1 turbo-molecular pump, 1 mechanical pump, 2 ion pumps
Control: Fully automated vacuum system with vacuum interlocks for operator safety
Vacuum Levels:
Electron gun: ≤ 9 × 10⁻⁸ Pa
Sample chamber: ≤ 5 × 10⁻⁴ Pa

Sample Chamber & Stage
Accessory Ports: 16
Stage Type: 5-axis motorized stage
Travel: X = 110 mm, Y = 110 mm, Z = 65 mm
Tilt: –10° to +70°
Rotation: 360° continuous
Chamber Volume: W = 360 mm, H = 317 mm, D = 310 mm
Max Sample Size: Ø 260 mm × 53 mm height, max load 500 g
Collision Prevention: Integrated hardware stage current sensor
Detectors
In-Lens Detector: Supports SE and top-BSE imaging modes
Everhart-Thornley Detector (ETD): Supports SE and BSE
Retractable BSE Detector (GY-BSED203): Four independent sensor segments, three imaging modes including compositional contrast

Imaging & Software
Display Resolutions: 768×512 or 1536×1024 pixels
Max Image Storage: up to 48,000×32,000 pixels
Simultaneous Acquisition: Up to 4-channel live mode

Energy-Dispersive X-Ray Spectroscopy (EDS)
Bruker Quantax Compact 30 system featuring:
Silicon Drift Detector (SDD): Maintenance-free, LN₂-free, high-speed, and sensitive to light elements
Standardless Quantification: Manual, automatic, or interactive modes for surface or rough samples
Acquisition Modes: Mapping, line scan (PTS), HyperMap with real-time deconvolution
Reporting Tools: Quick reporting and free offline analysis software