| An electron source with HV supply | |
| Emitter | LaB6 |
| Acceleration | 160kV |
| Beam size | 40nm in STEM imaging 700 nm in diffraction |
| Electron-Optical System | |
STEM imaging Mode Resolution | single image scanning 20nm |
Diffraction Mode Resolution | continuous totation 0.82 Ao |
| Sample handling | |
Load-lock system for sample insertion Goniometer Type Rotation Speed Accuracy Sphere of confusion | 5-axis goniostat full 360° 2°/s 0.02° <0.5 μm |
| Detection system | |
Hybrid-pixel detector Sensor Number of pixels Energy range Distance to sample | Si 512x512 30-200keV fixed |
| Cryo function (optional) | |
| Cooling by conduction to achieve temperatures close to liquid nitrogen | |
| Vacuum system | |
| Contains all necessary items like pumps, sensors and valves | |
| Housing | |
| Contains integrated safety looks for operation of the device | |
| Eldico control PC | |
| Personal computer including software | |