X-ray Photoelectron Spectroscopy FlexMod

Introduction 

FlexMod is a series of specialized building-block type modules, that can be combined with each other or existing systems can later on be extended. There are well defined modules for XPS (FlexPS), SPM (FlexPM), Preparation (FlexPrep) and sample introduction (FlexIntro). The frames and baking tents standardized regarding shape, size and height. System automation can be offered optionally. 

The FlexMod system modules is a modular concept combining various building blocks of surface science analysis solutions into one system. Using this concept, scientists can concentrate on scientific problem solutions, instead of diving into the small details of complicated system designs.The user can start from well-planned, well-specified and application-optimized building block type modules for a dedicated task. With all modules having equal form factors, immediate or later combination of several of these optimized modules help to build-up a multi-method system, exactly optimized to the recent application and in future even growing with extended tasks.

 

Specially Designed UHV Chamber with an Optimized Geometry for Combination of  such Electron Spectroscopy Applications as XPS, UPS, AES and ISS with Full Performance for each Method.

The heart of the photoelectron spectroscopy system FlexPS is a specially designed UHV chamber with an optimized geometry for all common electron- and ion spectroscopy applications. The chamber is made of μ-metal in order to optimize magnetic shielding and allow the highest energy resolution. For less sensitive applications, a stainless steel configuration is also available.The system base fits a variety of pumping configurations available to meet specified gas load and base pressure requirements. Thanks to the unique design, components can easily be added, upgraded and exchanged. Within the flexible system concept, different sample handling options can be chosen with respect to sample size, temperature range and manipulation possibilities. Our photoelectron spectroscopy system FlexPS allows sample sizes up to 2” using manipulation possibilities with up to 6 degrees of freedom. It offers fitting solutions for all standard heating and cooling operations, thus covering a broad temperature range. Additional sample storage slots can be implemented to increase the system’s efficiency or to upgrade for multi-user operation.

Centerpiece for electron spectroscopy is the highly flexible hemispherical analyzer PHOIBOS, available configurations for ESCA, XPS, ARXPS, ARPES, UPS, AES, SAM, ISS, snap shot data acquisition and 2D detection modes. Depending on the application, suitable excitation sources can be chosen from a wide range of options:

  • X-ray sources for X PS/ESCA includuding twin anode X -ray source XR 50 and monochromatic X -ray source FOCUS 500 and special μ-FOCUS sources
  • Electron source EQ 22 for AES and electron sources for SEM/SAM down to 100 nm lateral resolution
  • Variety of UV sources for UPS: UVS 10/35, µSIRIUS with optional monochromator
  • Flood Gun FG 15/40 for charge compensation
  • Ion sources for sample preparation, depth profiling and ISS: IQE 11/35 and IQE 12/38
  • Sample manipulator with up to 6 axis, sample size up to 2” and heating and cooling facilities

Specially Designed UHV Chamber with Wide Range in situ  Preparation Techniques including Ion Etching, E-beam Deposition, LEED and  RHEED analysis.

FlexPrepKEY FEATURES

  • Optimized geometry for various in situ sample preparation and analysis applications
  • Easily customizable
  • Easily upgradable
  • Cost-effective

The FlexPrep module allows a wide range of in situ preparation techniques including ion etching, e-beam deposition, as well as LEED and RHEED analysis. SPECS also provides the corresponding variety of technical equipment and accessories. The FlexPrep module is an extension of the FlexPS and FlexPM modules for separate but in situ sample preparation. This allows the highest purity level in analysis combined with the required flexibility for preparation. The pumping configuration also can be chosen to meet gas load and base pressure requirements. Within the flexible system concept, sample handling can also be chosen regarding sample size, temperature range and manipulation possibility, to meet the experimental requirements optimally.  The FlexPrep sample manipulation includes solutions up to 2” sample size with up to 5 degrees of freedom and extended sample heating and cooling features. In addition, sample storage facilities can be added. Depending on the application, suitable accessories for sample preparation can be chosen from a wide range of options:

  • Ion source IQE 11/35 for sample cleaning
  • Plasma sources PCS-ECR, MPS-ECR or PCS-RF for sample preparation with reactive gases
  • E-beam evaporators in single pocket, EBE-1, or multipocket, EBE-4, configurations for thin film depositon
  • LEED optics ErLEED with Auger option and Safire software package for image acquisition and evaluation 
  • RHEED RHD-30 package with Safire software option and elevated pressure option
  • Sample manipulator with up to 6 axis, sample size up to 2” and heating and cooling possibilities

 

Fast Sample Introduction Load Lock with Quick Acess Door, Pumping System and Optional Sample Storage

KEY FEATURES

  • Fast sample loading
  • Minimized volume for fast pump down
  • Easily customizable
  • Easily upgradable
  • Cost-effective

Flex Intro is a special fast sample introduction load lock with minimized volume for fast pump down. Pumping options include an independent turbo pump station or a cost efficient bypass solution. The system is designed for sample handling and loading of the SPECS SH2/12 sample plates for sample sizes up to 10 mm x 10 mm.

Flex Intro Plus is an advanced multipurpose load lock system with upgrade paths for sample preparation and rotary sample distribution. The system has extended sample handling capabilities for up to 2” sample sizes, sample storage possibilities of up to 8 samples and rotary sample distribution. Optimized ports for sample preparation options, like heating for degassing, ion sputtering and deposition are included. The pumping configuration can be chosen to suit the desired base pressure, pump down speed and gas loads. The system has radial sample distribution with sample carousel and connection of up to 5 satellite chambers. Sample preparation possibilities include ion source IQE 11/35, hydrogen cracker source TGC-H, e-beam evaporators, EBE-1 or EBE-4 or plasma sources.

An optional sample storage in the loadlock system is available on request.

System Module for Flexible Sample Manipulation including Heating, Cooling and optional Motorization

KEY FEATURES

  • Variety of different sample plates available for direct current heating, e-beam heating, powder samples, etc.
  • Different materials available including stainless steel, Ta and Mo
  • Transferable thermocouple connection for precise temperature measurement at the sample surface, for example for temperature programmed desorption studies
  • Sample storage for up to three samples mounted to manipulator
  • Motorization of individual manipulator axis or all axis and PC control possibility
  • Easily customizable
  • Easily upgradable
  • Cost-effective

FlexMan module allows a flexible configuration with up to 5 degrees of freedom for sample manipulation and selection of Z-travel, including heating, cooling and optional motorization. For sample mounting, a variety of transferable sample plates are available. Samples are mounted directly to the sample plates, offering flexible operation. Heating and cooling options are integrated in the manipulator stage. The sample plates are transferred with a special transfer tool with sample locking mechanism mounted to a magnetically coupled transfer rod.

Specially Designed UHV Chamber with an Optimized Geometry for Combination of Sample Preparation Techniques and atomically resolved STM and AFM Applications.

KEY FEATURES

  • Optimized geometry for all SPM applications
  • Easily customizable
  • Easily upgradable
  • Cost-effective

The FlexPM module is based the high stability STM 150 Aarhus. The SPM Aarhus family includes configurations for pure STM and for STM/AFM combinations. For AFM, the special KolibriSensor is used which has a unique cross talk free parallel performance for STM and AFM. In all configurations, in situ tip preparation for optimum resolution in SPM is a unique feature of the Aarhus design. Fastest STM electronics as well as high flexibility Nanonis electronics for SPM can be chosen. The temperature range for SPM can be chosen from liquid nitrogen or helium to high temperatures up to 1300 K.

Depending on the application, suitable accessories for sample preparation can be chosen from a large range of options:

  • Ion source IQE 11/35 for sample preparation and tip preparation
  • E-beam evaporators in single pocket, EBE-1, or multipocket, EBE-4, configuration for thin film depositon
  • Sample storage with heating stage for sample preparation through direct current heating up to 1400 K

The latest addition to the SPECS system portfolio, the FlexProbe system, combines μ--probe XPS with HAXPES techniques in an innovative system solution. It is an illustration of our extensive experience in developing complex system solutions that fulfill the requirements for the most demanding scientific applications. 
One of the outstanding features of the system is that two small spot, monochromatic X-ray sources are mounted on the analysis chamber: the µ-FOCUS 195 with Al anode for µ-spot XPS analysis with 10µm lateral resolution as well as the µ-FOCUS 730 with Cr anode for HAXPES investigations. The fast and easy switch between AlKα (1.486 keV) and CrKα (5.414 keV) excitation energies allows the operator not only to characterize the sample surface, but also to gain insights into the bulk properties.
The FlexProbe system is equipped with a SPECS PHOIBOS 150 hemispherical electron analyzer with 1D-DLD detector, which is the perfect match for ultra-fast XPS and HAXPES measurements. Different components like gas cluster ion source or an UV source can be added to the analysis chamber. An optional fully equipped preparation chamber allows for sample preparation by using sputtering, annealing or deposition techniques. The integration of these components in our versatile and easy-to-use SpecsLab Prodigy software package makes FlexProbe the perfect tool for your daily demanding XPS measurement tasks.

KEY FEATURES

  • PHOIBOS 150 energy analyzer with delay line detector (DLD) for ultra-fast measurements
  • High-performance monochromatic Al Kα source for μ-Probe XPS
  • High-performance monochromatic Cr Kα X-ray source for HAXPES
  • 4-axes sample manipulator with e-beam heating and LN2 cooling
  • Optional UV source UVS 10/35 for UPS measurements
  • Optional dedicated sample preparation chamber
  • SpecsLab Prodigy software suite
  • Vacuum control software for system operation
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