FE - LEEM/PEEM P90 AC

KEY FEATURES

  • 2 nm resolution in AC-LEEM mode
  • 90° magnetic deflector
  • Cold Field emitter
  • Energy filter (optional)
  • Rapid LEED/LEEM switching
  • Fast sample exchange
  • Energy filtered PEEM with focussing UV source UVS 300

The SPECS LEEM instrument FE-LEEM P90 AC is a next generation Low Energy Electron Microscope with integrated aberration correction, showing astonishing 2 nm resolution for dynamic LEEM microscopy experiments. With this instrument, based on the design of Dr. Rudolf Tromp, nanometer scale processes on surfaces can be observed in real-time. 

Guiding the design of the SPECS FE-LEEM P90 was the goal to achieve an extremely high resolution with a minimum number of electronoptical elements. 
In order to achieve this incoming and outgoing electrons are separated by a 90° magnetic prism array. This geometry allows a simple, intuitive step by step adjustment of all lens parameters. The magnetic prism transfers both the LEEM image and the LEED pattern astigmatically, allowing routine switching between real image and diffraction. Both image and LEED pattern are transferred without the negative effects of chromatic dispersion, offering superior image and diffraction capabilities. 
A sophisticated energy filter enables imaging with an energy resolution down to 250 meV with a minimal impact on the high spatial resolution of the instrument. 
The FE-LEEM P90 is integrated into a UHV LEEM sample analysis chamber with facilities for sample preparation and in-situ high temperature sample processing.

Performance

Lateral Resolution

3 nm Guaranteed, 1.6 achievable (LEEM) 
8 nm (PEEM)

Energy Resolution

< 250 meV (Spectroscopy)
< 1.7 eV (Imaging)

Field of View

800 nm - 100 µm

Base Pressure

< 2x10-10 mbar

Sample Temperature

RT - 1500 K
150 K optionally available

Spot Size

< 40 µm - < 200 nm
(LEEM with micro diffraction aperture)

Lateral Stability

< 5 nm

Lateral Reprodicibility

< 500 nm

Operation

Magnification

400x - 5000x

Kinetic Energy Range

0-1000 eV

Extraction Voltage

2 keV - 15 keV

Electron Gun

Cold Field Emission Gun
with < 300 meV Energy Width

Mounting

Energy Filter

90° Magnetic Prism

Slits/Apertures

Integrated Contrast and Field Apertures

Sample Holder

SPECS SH2/12
Stub Sample Holder

Aberration Correction

Additional 90° Magnetic Prism
with Correction Optics

AC FE-LEEM P90 Double Stage Results

AC FE-LEEM P90 Double Stage Results

This application note shows results obtained with the SPECS FE-LEEM P90, measured at the Kamerlingh Onnes Laboratory at the University of Leiden in April 2011. The sample is graphene on SiC.

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