X-ray Fluorescence (XRF) Microscopy AttoMap-310

Key Advantages:

All the benefits of the AttoMap-200:

Plus, advances exclusive to the AttoMap-310, including:

Highest Resolution of any XRF Microscope on the Market

Micro x-ray fluorescence (microXRF) as a technique provides excellent sensitivity for compositional analysis, with sensitivities typically 1000X that of electron-based spectroscopy (ppm vs. ppt). The major limitation for laboratory-based microXRF has been the spot sizes achievable, which are typically around 20-50 µm. Sigray AttoMap achieves the highest spatial resolutions available on the order of single digit micrometers (3-5 µm) through the use of Sigray’s proprietary x-ray focusing optics. These x-ray focusing optics are much higher in efficiency and produce far smaller spot sizes than the polycapillary optics used by other laboratory microXRFs.

Sub-ppm Sensitivities (Sub-Femtogram)

AttoMap achieves unprecedented sensitivities at absolute detection limits of sub-femtogram and relative detection limits of sub-parts per million. This enables microscopy of trace element distributions at good throughput. The system’s accuracy and speed are why the AttoMap has been adopted by leading semiconductor companies for monitoring processes involving trace-level dopants.

Cobalt laddered measurements demonstrating lower limit of detection (LLD) of 0.03 Angstroms equivalent film thickness, or around 8.75 x 10^12 atoms/cm^2

Energy Tunability for High Throughput and Sensitivities

X-ray fluorescence is highly dependent on the energy of the illuminating x-ray beam. Fluorescence cross-sections can vary by several orders of magnitude, as can be seen in the corresponding table of a select number of elements. Sigray’s AttoMap-310 provides easy software-selection of up to 5 target materials, including exotic target materials such as a silicon-based source and a gold-based source, to ensure the ultimate sensitivity for a broad range of elements. Other x-ray sources are limited to only a single x-ray target material, which only allows maximizing the sensitivity and throughput for a subset of materials.

A visual depiction of how significant the impact of energy tunability through x-ray source target selection can be seen in the image below, comparing an arsenopyrite sample imaged using a tungsten (W) target and a molybdenum (Mo) target.

Fluorescence cross-sections in barns/atom for select elements of interest as a function of x-ray source target material (top row).

As you can see, fluorescence cross-sections can vary by several orders of magnitude depending on x-ray target selection!

Comparison of As channel in a arsenopyrite sample. Arsenic sensitivity is dramatically increased because of the substantially better As fluorescence cross-section for Mo than W

Shallow Angle Imaging for Biological, Geological, and Semiconductor Samples

A key feature on the AttoMap-310 is its incorporation of a goniometer stage that allows for a wide range of incidence angles from normal incidence (90 degrees) to near-grazing (3 degrees) incidence. This provides a number of advantages. For thin samples such as tissue sections or thin films, the imaging can be vastly improved at shallower x-ray incidence angles because the x-ray interaction volume increases and the background is substantially reduced. For crystalline samples (e.g., silicon wafers), diffraction peaks can be completely avoided.

Light Element Detection

AttoMap-310 provides detection of elements down to B and enables trace-level (<1%) quantification of organics such as C, O, N. This is accomplished through the system’s incorporation of a specialized low energy detector and a vacuum enclosure that achieves evacuated environments of better than 10^-4 Torr. The system can also be run in ambient mode for maximum flexibility.

Low Z element detection including Boron
Linearity of Ge (2nm, 5nm, and 10nm) in a silicon wafer

 

 

 

 

 

Mineralogy

Automated mineralogy using scanning electron microscope (SEM) has become a dominant approach used in natural resource exploration and process monitoring. AttoMap provides a powerful complement to SEM-based mineralogy approaches by providing 1000X the sensitivity of SEM-EDS for trace elemental mapping. The system’s intuitive software provides AI-based grain segmentation and mineralogical identification. AttoMap-310 also provides unprecedented sensitivity for light elements, such as B, C, O, N, P, etc.

Mineralogical mapping using Sigray’s AttoMap (left), a correlative optical image acquired with the AttoMap (upper right), and a SEM-EDS image of the same sample.

Oxygen (green), Phosphorus (red), Arsenic (pink), Calcium (blue), and Copper (yellow) mapped in a geological rock.

Courtesy Dr. S.S. Chinnasamy, Indian Institute of Technology Bombay, India

Life Sciences and Metallomics

AttoMap was originally designed for life science research with support of NIH funding. Applications in the life sciences include studying pathologies (e.g., cancer and Wilson’s Disease) that are hypothesized to be related to dysregulation of trace elements such as iron and copper, the distribution of nanoparticle-based therapeutics after injection, and environmental uptake of contaminants.

Elemental channels of a daphnia water flea

Semiconductor

AttoMap has been adopted by leading semiconductor companies for monitoring dopants and ultrathin films on test patterns. The system also provides trace-level measurements of organic contaminants and low atomic number (Z) materials such as B within its vacuum environment. Pattern recognition based software enables unsupervised, recipe-based acquisition of points for high efficiency.

For backend packaging, AttoMap provides high throughput metrology of micropillar dimensions, quantification of voids in microbumps, and rapid identification of defects.

300mm wafer in AttoMap

Environmental / Botany

Synchrotron XRF has become a technique of choice for many plant scientists for understanding element distribution. Such studies include metal uptake for photoremediation (reclaiming the environment), nutrient uptake, and genetically modified plants for desirable characteristics such as drought-resistance and improvement to nutritional content.

Hyperaccumulating seedling

Contaminants and Impurities in Industrial Processes (e.g., Batteries)

AttoMap is the highest resolution (e.g., 5 micrometers vs. 20+ micrometers) and highest sensitivity microXRF on the market. This allows it to uniquely resolve microns-scale impurities that can catastrophic, such as Fe impurities in battery electrodes. As reported in Cell Report Physical Science, AttoMap was successfully used to localize small particles of Zr, Hf, Cr, Fe, Cu, and Zn in a battery electrode.

AttoMap successfully found trace levels of Hf, Zr, Cr, increased Fe, Cu, and Zn that spatially varied within a battery electrode. Such contaminants can be catastrophic for batteries, causing shorts or degraded performance.

 

 

 

 

Technical Specifications of the AttoMap-310

 ParameterSpecification
OverallSpatial ResolutionDown to 3-5 μm with high resolution optic. 7-10 μm with standard optics.
SensitivitySub-ppm relative detection sensitivity. Picogram to femtogram absolute sensitivity.
Variable Angle Acquisition3 degrees (near-grazing) to 90 degrees (normal) in 0.01 degree increments.
SourceTypeSigray patented ultrahigh brightness sealed microfocus source
Target(s)Up to 5 targets.
Includes selection from Si, Cr, Cu, Rh, W, Mo, Au, Ti, Ag.
Others available upon request.
Power | Voltage50W | 20-45 kVp
X-ray OpticTypeSigray proprietary double paraboloidal x-ray mirror lens
Transmission Efficiency~80%
Magnification1:1 magnification default
Demagnifying optics for higher resolution available upon request
Interior CoatingPlatinum for increasing collection efficiency of optic
X-ray DetectorTypeSDD Detector
Energy Resolution<129 eV at Mn-Ka
DimensionsFootprint54" W x 65.5" H x 38.5" D
Stage Travel100 x 100 mm (upgrades available upon request)
Additional CapabilitiesOther ModalitiesIntegrated optical microscope and transmission x-ray microscope for alignment
SoftwareSigray Composition (GUI-based analysis tool)
Semiconductor Acquisition
Jupyter notebooks available upon request
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