Sigray 3D X-ray Microscope

Sigray’s 3D X-ray Microscope product family offers the most unique and innovative features on the market. Our turnkey microscopes offer a simple and intuitive experience for beginners while maintaining comprehensive access for power users. We’re vertically integrated across X-ray source, optics and detector which means we can bring you unique advances available nowhere else. We produce systems that span spatial resolutions from nanometers to millimeters to provide outstanding flexibility for a wide range of research application interests, including materials science, life science, semiconductor, additive manufacturing and pharmaceuticals.

Trilambda XRM

TriLambdaXRM-30 | Nanoscale 3D X-ray microscope with resolution down to 30 nm and three operating energies

 

 

Prisma XRM-810

PrismaXRM-810 | Flagship sub-micron 3D X-ray microscope featuring best in class versatility, resolution and throughput. Available upgrade to Talbot-Lau interferometry offers exclusive contrast modes: Quantitative Phase and Sub-resolution Darkfield

 

 

X-ray Microscope Chroma XRM-500

 

ChromaXRM-500 | Turnkey quasi-monochromatic 3D X-ray microscope with tunable energy and sub-micron resolution in a compact desktop form factor

 

 

ApexXCT-150| Image with 0.5 micron spatial resolution anywhere on samples up to 300 mm in diameter. With Apex XCT, you can streamline your FA workflows by imaging whole intact packages, wafers, and PCBs, mitigating time-consuming and destructive sample preparation protocols.

SpecificationTriLambdaXRM-30PrismaXRM-810ChromaXRM-500
GoalHighest laboratory spatial resolution XRM at 35 nmFlagship XRM offering largest voltage range and 0.5 µm spatial resolutionRevolutionary X-ray source offers multiple quasi-monochromatic X-ray beams
Dimensions [m]2.3 L x 1.3 W x 1.5 H2.2 L x 1.2 W x 2.3 H1.0 L x 0.8 W x 0.6 H
Weight [kg]21752730150
Source20 to 50 kV
100W
Sealed
Reflection
3 target materials
30 to 160 kV
25W
Sealed
Transmission
200 um min FOD
20 to 60 kV
100W
Sealed
Reflection
Up to 5 target materials
Detector4MP Deep Cooled CCD
4MP Direct Detection CCD
4MP Deep Cooled CCD
7MP Flat Panel (optional)
4MP Deep Cooled CCD
Up to 5 objectives
7MP Flat Panel (optional)
Resolution35 nm0.5 µm0.5 µm
Sample Size (diameter x height)50 x 50 um300 x 500 mm50 x 50 mm
Sample Weight150 g25 kg500 g
Sample Handling RobotNoOptional
Up to 20 samples
Optional
Up to 10 samples
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