Overview:
Thermal Evaporation (up to four 4" individual boats, or six 2" boat assemblies)
TORUS® Magnetron Sputtering sources (up to six 2" or 3" sources)
Electron Beam Evaporation Source (4 pocket 8cc, 8 pocket 12cc, 6 pocket 20cc)
LTE10 Organic deposition sources (up to two)
Combinations of the above techniques are also available.
Custom configurations are available upon request
Key features:
Enclosed instrument rack and chamber base
Box 304 stainless steel chamber with aluminum door and large viewport
Manual touch-screen or recipe-controlled
PC based process automation
Turbomolecular or optional cryogenic high vacuum pumping
Process Chamber Volume 100 liters
Process Chamber Geometry
Box Shaped 304L Stainless Steel chamber: 15.25” wide x 16.50” deep x 24” high (387.4mm wide x 419.1mm deep x 610mm high), internal dimensions.
Aluminum, O-ring sealed, hinged, front access door
O-ring sealed side plates (2), allow for maximum modularity and upgradeability
Process Chamber Construction 304L Stainless Steel with 6061 Aluminum Hinged Door
Cabinet Construction Carbon Steel, Fully Enclosed Instrument Rack, Open Chamber Area, Gray Powder Coat
Finish
Deposition Sources
(Available in various combinations)
Up to (6) 3'' Torus® Magnetron Sputtering Cathodes
4-Pocket 8cc Electron Beam Source, 8-Pocket 12cc, and 6-Pocket 20cc Available
Up to (4) 4'' Thermal Evaporation Sources
Up to 2 LTE Organic Material Evaporation Sources
Deposition Orientation Sputter Up, Evaporation Up
Substrate Cleaning Ion Source or Bias eH400 end-Hall ion source, KDC40 gridded ion source, or 100W RF bias
Substrate Size (max) Single 6'' (150mm) with 20 RPM Max Variable Rotation
Substrate Heating Up to 850°C (150mm) or water cooled (150mm)
Standard Vacuum Pumping
790 l/sec Turbo Pump — 5 x 10-7 torr (6.7 x 10-7 mbar)
1250 l/sec Turbo or — 8 x 10-8 torr (1.1 x 10-7 mbar)
1500 l/sec Cryo Pump Available — 5 x 10-8 torr (6.7 x 10-8 mbar)
Gauging Wide Range Vacuum Gauge
Process Gas 4 Channel Mass Flow Control with 3-position or variable position gate valve
System Control PC-Based HMI, eKLipseTM advanced recipe control and datalogging
Required Power (typical, based on options) 208VAC, 3Ø, 50/60 Hz; Optional 380VAC, 3Ø, 50/60 Hz
Available Certifications, Markings
Systems within the European Economic Area (EEA) are CE marked and comply with the
Following EU directives:
Upgradable
