Process Chamber Volume | 58 liters |
Process Chamber Geometry | Horizontally Oriented, Cylindrical 304L Stainless Steel Chamber Body: 15.13” Diameter x 16.25” Overall Length (OAL). |
Process Chamber Construction | 304L Stainless Steel with 6061 Aluminum. Pendulum Door Assembly |
Cabinet Construction | Carbon Steel, Fully Enclosed Instrument Rack, Open Chamber Area, Gray Powder Coat Finish |
Deposition Sources | Up to (3) 2’’ or 3’’ Torus® Magnetron Sputtering Cathodes |
| Up to (4) 2’’ Thermal Evaporation Sources |
| Up to (4) LTE Organic Material Evaporation Sources |
| Combination Baseplate of (2) 2'' Thermal & (2) LTE Sources |
Deposition Orientation | Sputter Up, Evaporation Up |
Substrate Size (max) | 100mm x 100mm, 150mm Dia |
Substrate Heating | Up to 800°C, with a 1'' Static Platen; Up to 350°C, Rotating 100mm x 100mm or 150mm Diameter Platen |
Standard Vacuum Pumping | 260 l/sec Turbo Pump |
Gauging | Wide Range Vacuum Gauge |
Process Gas | Up to 2 Fujikin FCST1000F Mass Flow Controllers |
System Control | PC-Based HMI, with Optional Recipe Control and Datalogging |
Required Power (typical, based on options) | 208VAC, Single Phase, 50/60 Hz; Optional 380VAC, Single Phase, 50/60 Hz |
Available Certifications, Markings | Systems within the European Economic Area (EEA) are CE marked and comply with the following EU directives:Low Voltage Directive (LVD) 2014/35/EU / Electromagnetic Compatibility (EMC) Directive 2014/30/EU : CSA and NRTL |
Warranty | 12 Months upon Shipment |
Overall Dimensions (approx) | Door Closed: 34'' (864mm) wide x 32'' (813mm) deep x 75'' (1911mm) high Door Open: 48’’ (1207mm) wide x 32’’ (813mm) deep x 75’’ (1911mm) high |
Weight (approx) | 650 lbs (295 kg) |