X-ray Fluorescence (XRF) Microscopy AttoMap-200

Dopant Concentrations and Thin Film Thickness

Quantitative analysis of thin films, coatings, and buried layers down to sub-atomic equivalent thicknesses and dopants at 10^14 atoms/cm^2 can be obtained through standard-less fundamental parameters or with standards. Thickness variations at the microns-scale can be determined.

Trace Element & Nanoparticle Analysis

The AttoMap provides unprecedented sensitivity of sub-femtogram (and sub-ppm) to measure the distribution of multiple elements simultaneously. Applications include: rare earth elements in geological samples, nanoparticles (e.g. 50-100 nm), metallomics, forensics, contaminants in advanced materials, and more.

Mineralogy for Mining & Oil and Gas

Measurements and elemental imaging to determine co-location of trace-level minerals and rare earth elements at ppm-scale is possible at microns-scale

Quantitative Composition

Elemental composition and their relative percentages can be obtained for both point analysis and for larger regions, including specific regions of interest or the complete sample. Data is acquired and stored as a hypermap, with each pixel and its spectra, for ultimate flexibility in analysis.

COMPARE TO LEADING CONVENTIONAL MICROXRFS:

  1. Highest resolution: <8-12 um spot
  2. Highest sensitivity: sub-ppm & sub-femtogram
  3. Fastest: single minute  vs. half a day for equivalent measurements, with up to 100X throughput
  4. Most accurate quantification, due to achromatic focusing
  5. Superior sample flexibility for large and heavy samples or uneven sample surfaces
  6. Correlative capabilities within a single system (includes 2D x-ray microscopy and optical microscopy)

Technology for Synchrotron Performance

HOW DOES THE ATTOMAP ACHIEVE ITS SUPERIOR PERFORMANCE?

The AttoMap features key innovations in its:

  1. High brightness x-ray source with 50X brightness of microfocus sources used in conventional microXRFs
  2. Paraboloidal x-ray optics with major advantages over conventional polycapillary microXRF systems, including
  3. Unique detector geometry with 3-4X collection angle than conventional systems

Mineralogy

Automated mineralogy using scanning electron microscope (SEM) has become a dominant approach used in natural resource exploration and process monitoring. AttoMap provides a powerful complement to SEM-based mineralogy approaches by providing 1000X the sensitivity of SEM-EDS for trace elemental mapping. The system’s intuitive software provides AI-based grain segmentation and mineralogical identification.

Mineralogical mapping using Sigray’s AttoMap (left), a correlative optical image acquired with the AttoMap (upper right), and a SEM-EDS image of the same sample.

Life Sciences and Metallomics

AttoMap was originally designed for life science research with support of NIH funding. Applications in the life sciences include studying pathologies (e.g., cancer and Wilson’s Disease) that are hypothesized to be related to dysregulation of trace elements such as iron and copper, the distribution of nanoparticle-based therapeutics after injection, and environmental uptake of contaminants.

Elemental channels of a daphnia water flea

Semiconductor

AttoMap has been adopted by leading semiconductor companies for monitoring dopants and ultrathin films on test patterns. The system also provides trace-level measurements of organic contaminants and low atomic number (Z) materials such as B within its vacuum environment. Pattern recognition based software enables unsupervised, recipe-based acquisition of points for high efficiency.

For backend packaging, AttoMap provides high throughput metrology of micropillar dimensions, quantification of voids in microbumps, and rapid identification of defects.

300mm wafer in AttoMap

Environmental / Botany

Synchrotron XRF has become a technique of choice for many plant scientists for understanding element distribution. Such studies include metal uptake for photoremediation (reclaiming the environment), nutrient uptake, and genetically modified plants for desirable characteristics such as drought-resistance and improvement to nutritional content.

Hyperaccumulating seedling

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Technical Specifications of the AttoMap-200

 ParameterSpecification
OverallSpatial ResolutionDown to 3-5 μm with high resolution optic. 7-10 μm with standard optics.
SensitivitySub-ppm relative detection sensitivity. Picogram to femtogram absolute sensitivity.
SourceTypeSigray patented ultrahigh brightness sealed microfocus source
Target(s)Up to 5 targets.
Includes selection from Si, Cr, Cu, Rh, W, Mo, Au, Ti, Ag.
Others available upon request.
Power | Voltage50W | 20-50 kVp
X-ray OpticTypeSigray proprietary double paraboloidal x-ray mirror lens
Transmission Efficiency~80%
Magnification1:1 magnification default
Optional demagnifying optics for higher resolution
Interior CoatingPlatinum for increasing collection efficiency of optic
X-ray DetectorTypeSDD Detector
Energy Resolution<129 eV at Mn-Ka
DimensionsFootprint54" W x 65.5" H x 38.5" D
Stage Travel200 x 200 mm standard
300 x 300 mm for semiconductor wafers
Maximum Sample Size300 x 300 mm
Additional CapabilitiesOther ModalitiesIntegrated optical microscope and transmission x-ray microscope for alignment
SoftwareSigray Composition (GUI-based analysis tool)
Semiconductor Acquisition
Jupyter notebooks available upon request

 

 

 

  • Chia sẻ qua viber bài: X-ray Fluorescence (XRF) Microscopy AttoMap-200
  • Chia sẻ qua reddit bài:X-ray Fluorescence (XRF) Microscopy AttoMap-200

PRODUCTS

Loading...

RELATED PRODUCTS

IQM Resonance – Quantum Cloud Platform

IQM Resonance – Quantum Cloud Platform Supplier: IQM – Finland IQM Resonance is a fully managed cloud-based quantum computing platform that provides instant access to advanced Quantum Processing Units (QPUs), ideal for enterprises, research institutes, and academic environments.
Xem thêm

IQM Radiance 20, 54 and 150 Qubits quantum computer

IQM Radiance 20, 54 and 150 Qubits quantum computer Model: IQM Radiance Manufacturer: IQM Quantum Computers - Finland Origin: Finland IQM Radiance is an advanced superconducting quantum computing platform designed for high-performance computing (HPC) centers, data centers, government agencies, and enterprises seeking to harness quantum advantage. With high-quality qubits and hybrid integration, Radiance is an ideal solution for practical applications in machine learning, cybersecurity, energy optimization, and chemical research.
Xem thêm