Secondary Ion Mass Spectrometer SIMS 7f-Auto

Versatile SIMS Tool: Reference Detection Sensitivity with High Throughput & Full Automation. The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer (SIMS) product line. Designed to deliver high precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, metals, ceramics, Si-based, III-V and II-VI devices, bulk materials, thin films... fulfilling industry requirements for efficient device development and process control.

 

Key analytical features for solving a wide range of analytical problems
The IMS 7f-Auto offers unparalleled depth profiling capabilities with high depth resolution and high dynamic range. The high transmission mass spectrometer is combined with two reactive, high-density ion sources, O2+ and Cs+, thus providing high sputter rate and excellent detection limits. A unique optical design allows both direct ion microscopy and scanning microprobe imaging.

Improved automation & operation efficiency
The IMS 7f-Auto is equipped with a redesigned, in-line primary column for easier and faster primary beam tuning and optimized primary beam current stability. New automated routines minimize operator related biases and improve ease-of-use. A motorized storage chamber with automated load / unload of sample holders ensures high throughput through analysis chaining and remote operation.

High reproducibility at high throughput
Thanks to its new motorized storage chamber & sample transfer, the IMS 7f-Auto can analyze multiple samples in chained or remote mode. Measurements can be fully unattended and automated, with unequalled throughput and reproducibility. Ultimate reproducibility can be achieved (RSD < 0.5 %), together with excellent detection limits, high throughput and productivity (tool can be used 24h a day with minimum operator intervention).

SIMS detects trapped hydrogen in alloys

Detecting trapped hydrogen in aluminum alloy (SIMS)

Dynamic SIMS is recognized as one of the most promising techniques to visualize the local distribution of H atoms in metallic materials, and the IMS 7f-Auto proves a tool of choice for hydrogen embrittlement studies thanks to...Keep Reading

oxygen-depth-profiling-in-steel

Oxygen depth profiling in Zn coated steel (SIMS)

The IMS 7f-Auto offers unique depth profiling and ion imaging capabilities which are useful for the study of inclusions and segregation effects in alloys. Keep Reading

Small area analysis in Sn Cu wire structure with SIMS

Small area analysis in Sn-Cu wire structures (SIMS)

Thanks to its outstanding imaging capabilities, the IMS 7f-Auto is a tool of choice for R&D of advanced engineering materials: diffusion in polycrystalline samples, surface imaging analysis...Keep Reading

Deep and shallow implant depth profiling

Deep and shallow implant depth profiling (SIMS)

The IMS 7f-Auto is widely used for dopant monitoring in the semiconductor industry, and applied to different species and material systems. Keep Reading

Impurity control with SIMS - O depth profile in Si

Impurity control (SIMS)

Dynamic SIMS is one of the most efficient techniques for measuring trace concentrations of impurities in semiconductors. Keep Reading

Dopant monitoring in LEDs with SIMS

Dopant monitoring in LED devices (SIMS)

CAMECA SIMS instruments are extremely useful in investigating the composition and characterizing the elemental distribution of dopants and impurities on different layers, making them your best choice for R&D and process...Keep Reading

SIMS depth profiling of Nitrogen doping in Cu2O

Materials for Energy & Catalysis (SIMS)

SIMS nitrogen concentration depth profiles in Cuprous oxide (Cu2O) films doped with nitrogen plasma help enhancing the conductivity of this material used for low-cost solar-energy conversion and photocatalysis. Keep Reading

CIGS thin film solar cells

CIGS thin film solar cells (SIMS)

Dynamic SIMS instruments are best fit to characterize the elemental in-depth distribution (matrix species & alkali metals Na and K) in various different CIGS thin films. Keep Reading

Purity control in PV Si feedstock

Purity control in PV Si feedstock (SIMS)

The IMS 7f-Auto is the tool of choice for quality control of the Si purification process which is mandatory to ensure high yield manufacturing of Si-based solar cell devices. Keep Reading

Nuclear waste management - SIMS depth profiling in nuclear glass

Nuclear glass alteration mechanisms (SIMS)

Offering excellent depth profiling capabilities for low concentration elements and high precision isotopic analyses, the IMS 7f-Auto is a powerful tool for analyzing nuclear glasses. Keep Reading

Helium in nuclear reactor - SIMS depth profile

Helium migration in nuclear reactors (SIMS)

Compared to other techniques commonly used for the analysis of nuclear materials, SIMS provides better sensitivity, dynamic range and depth resolution.  Keep Reading

 

IMS 7f-Auto video

IMS 7f-Auto Automation

See the IMS 7f-Auto in action in our last video: high analytical performance with full automation & ease of use - The leader Secondary Ion Mass Spectrometry sensitivity and throughput. You too can get your data overnight!

 

 

Optimization of carbon detection limit in Silicon using the raster change methodSeoyoun (Joan) Choi, CAMECA expert application engineer for SIMS, presents applications of the “raster change” dynamic SIMS method for measuring the carbon concentration in silicon samples. Click here to view

 

 

Lithium Diffusion In Li-Ion Battery Materials Revealed By SIMSLearn from Dr Naoaki Kuwata, NIMS, Japan, how Secondary Ion Mass Spectrometry can be used to accurately measure lithium diffusion coefficients in Li-based thin films, supporting Li-ion battery material optimization. Click here to view

 

 

Trace Level SIMS Quantitation For Particle Accelerators

Dr Jonathan Angle reviews SIMS methodologies developed at Virginia Tech to solve mysteries specific to the characterization of SRF cavities, (predictive modeling of O diffusion, identification of contaminants from cavity furnace treatments, etc.).Click here to view

 

 

Using SIMS for materials development of high-performance solid oxide fuel cellsKatherine Develos-Bagarinao will present her most recent research projects on SOFCs using Secondary Ion Mass Spectrometry (SIMS) as a primary characterization tool. Click here to view

 

 

Application of SIMS in Solar PV Research: The Role of Hydrogen in Crystalline Silicon Solar CellsIn this webinar, Dr Di Kang will present results suggesting that, to achieve the highest passivation quality, an optimum amount of hydrogen surrounding the interfacial SiOx is needed, while insufficient or excess hydrogen can both lead to degradation of poly-Si passivation. Click here to view

 

 

The Principles of Dynamic SIMS

This free on-demand webinar is an excellent introduction to the dynamic SIMS technique. Different practical aspects are discussed:

 

  • Choice of primary and secondary beam species
  • Relative sensitivity for various elements
  • Matrix effects
  • Depth resolution & Lateral resolution
  • Depth profiling (choice of impact energy & sputtering rate, calibration method)
  • Scanning ion imaging mode
  • A summary of dynamic SIMS main analytical characteristics is provided at the end.

Click here to view

 

 

  • SIMS analysis of an oxide thin film with continuous composition gradient

    Explore the application of Dynamic SIMS on thin film analysis with our speaker Joseph Scola, from the University of Paris-Saclay/UVSQ.
    ↓ Watch the webinar on demand or download our one-pager document highlighting the key takeaways.

    Click here to view

  • Enhanced Characterization of Very Deep Proton Implants with Dynamic SIMS

    Explore the superior capabilities of Dynamic SIMS for analyzing low-dose deep proton implants in industrially relevant silicon with Orazio Samperi, University of Catania/STMicroelectronics Key take aways include: The importance of proton implantation, the pivotal role of Dynamic Secondary Ion Mass Spectrometry for analyzing low-dose deep proton implants in silicon, ensuring quality and performance of semiconductor devices and a new protocol enabling reliable depth profiling of H implants with concentrations in the order of 1E16cm-3, exceeding depths of 20 μm! .
    ↓ Duration: 60 minutes

    Click here to view

  • Advancing High-Efficiency Silicon Solar Cells through Inkjet Printing of Polysilicon Passivating Contacts: Insights from SIMS Analysis - Webinar

    Australian National University scientists Dr. Sieu Pheng Phang and Ms Jiali Wang report on the use of Dynamic SIMS to characterize inkjet-printed passivating contacts for improved silicon solar cells.
    ↓ Duration: 38 minutes

    Click here to view

  • Optimization of carbon detection limit in Silicon using the raster change method

    Seoyoun (Joan) Choi, CAMECA expert application engineer for SIMS, presents applications of the “raster change” dynamic SIMS method for measuring the carbon concentration in silicon samples.
    ↓ Duration: 14 minutes

    Click here to view

  • Lithium Diffusion In Li-Ion Battery Materials Revealed By SIMS

    Learn from Dr Naoaki Kuwata, NIMS, Japan, how Secondary Ion Mass Spectrometry can be used to accurately measure lithium diffusion coefficients in Li-based thin films, supporting Li-ion battery material optimization..
    ↓ Duration: 18 minutes

    Click here to view

 

 

An Excel spreadsheet compiling scientific research articles using the IMS xf (IMS 3f, 4f, 5f, 6f, 7f, IMS 7f-Auto, IMS 7f-GEO). The articles are ordered by main applications as below and are easily searchable with Excel word search functions:

  • Materials
  • Geosciences
  • Nuclears

Download speadsheet here

  •  

SmartPro news

SmartPRO

The new SmartPRO software package for CAMECA IMS 7f-Auto, IMS Wf and SC Ultra Secondary Ion Mass Spectrometers combines Chain Analysis and WinCurve in a seamlessly integrated environment and adds real time data processing and...

 

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WinCurve dataprocessing sofware

WinCurve

Specifically developed for CAMECA SIMS instruments, WinCurve offers powerful data processing & visualization capabilities in a user-friendly environment.

 

Keep Reading

WinImage Software

WinImage II

Specifically developed for CAMECA SIMS instruments, WinImage II offers powerful image visualization, processing & printing capabilities under PC-Windows™ Environment.

 

Keep Reading

APM Software

APM

Automated Particle Measurement (APM) is CAMECA software tool allowing fast screening of millions of particles, particle detection and isotopic characterization.

 

Keep Reading

 

Specific to IMS 6f users: extend the lifetime of your instrument with our IMS 6f overhaul program:
IMS 6f ion microprobes are robust, but old instruments whose electronic components are becoming obsolete. To minimize the risk of long, non-scheduled downtime, CAMECA  offers an IMS 6f overhaul program, that will fully rejuvenate your instrument with a complete new electronics system, pumping and vacuum, new hardware, full automation, user-friendly acquisition and processing software, etc...
Download the IMS 6f-E7 upgrade flyer for all details of this upgrade and its benefits in terms of performance, productivity, ease-of-use, and of course, uptime and sustainability.


To view upgrade options available for IMS 6f-E7 and 7f, click on either of the components below:
Automation & Software
Sources
Airlock
Specimen Chamber
Optical System
Vacuum

Automation & Software

PC-Automation (7f equipped with SUN workstation)
PC automation system to replace SUN system, allows full automation & unattended operation and greatly improves performance and throughput.

Post-treatment Station (6f-E7/ 7f)
PC computer for off-line data processing (CAMECA software not included).

Desk Control Duplication (7f with PC-Automation / 6f-E7)
Instrument control from an operator room. Ensures optimized operation comfort when the lab is split in two parts.

APM Software Licence (PC-Automation / 6f-E7 /7f with PC-Automation)
Automated Particle Measurement software program for fast screening of large numbers of particles and detection of specific elements or isotopes. More information.

WinCurve Software Licence (offline) (7f / 6f-E7)
Offers powerful SIMS data processing & graphing capabilities. More information.

WinImage II Software Licence (offline) (7f / 6f-E7)
Offers powerful SIMS image processing capabilities. More information.
 

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Sources

Cs Ion Source Isolation (7f with PC-Automation)
Isolation and Pumping of the Cesium Microbeam Source.

Duo Accel/Decel (7f with PC-Automation)
Low primary ion energy system for the duoplasmatron source.

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Airlock

Storage Chamber Upgrade (7f with PC-Automation / 6f-E7)
Manual storage chamber with its load-lock designed to store up to six sample holders under high vacuum. Ensures substantial throughput improvements for applications that depend on the best UHV conditions. 

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Specimen chamber

Z-Motion (7f with PC-Automation / 6f-E7)
Z-Axis manual adjustment for the sample stage.

Turbospectro upgrade (7f with PC-Automation / 6f-E7)
Turbomolecular pumps for the mass spectrometer (to replace the existing ion pumps, for optimized pumping speed in the mass spectrometer and improved abundance sensitivity while using the oxygen flooding.

Digital Video Camera (7f with PC-Automation / 6f-E7)
Numerical camera and LED sample illustration system (white light).

EPS (7f with PC-Automation)
Electrical isolation of the magnet flight tube in order to allow fast mass peak switching.

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Secondary Optical System

EM Detector Post-accelaration (7f with PC-Automation)
Postacceleration for the electron multiplier detector. Increases sensitivity when analysing heavy elements and when running the mass spectrometer at low secondary extraction voltage (<3 kV).
 

Vacuum

Pfeiffer Turbopump 7f
Peiiffer Turbopump 6fe7

 

 

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